Trials for Multi-Functionalization on Biodegradable Resins Through Forming Thin Films by Ion Beam Mixing Method

Nanocrystalline magnetite thin films grown by dual ion-beam sputtering

Point defects in Sc2O3 thin films by ion beam sputtering.

We show that the concentration of oxygen interstitials trapped in Sc2O3 films by ion beam sputtering from metal targets can be controlled by modifying deposition conditions. We have identified point defects in the form of oxygen interstitials that are present in Sc2O3 films, in significantly high concentrations, i.e., ∼10(18)  cm(-3). These results show a correlation between the increase of oxy...

Surface Nanostructuring of TiO2 Thin Films by Ion Beam Irradiation

This work reports a procedure to modify the surface nanostructure of TiO2 anatase thin films through ion beam irradiation with energies in the keV range. The irradiation with N ions leads to the formation of a layer with voids at a depth similar to the ion projected range. By setting the ion projected range few tens of nanometres below the surface of the film, well ordered nanorods appear align...

Simulation of Fabrication toward High Quality Thin Films for Robotic Applications by Ionized Cluster Beam Deposition

The most commonly used method for the production of thin films is based on deposition of atoms or molecules onto a solid surface. One of the suitable method is to produce high quality metallic, semiconductor and organic thin film is Ionized cluster beam deposition (ICBD), which are used in electronic, robotic, optical, optoelectronic devices. Many important factors such as cluster size, cluster...

Ion beam enhanced grain growth in thin films

A research program has been established to study ion beam enhanced grain growth (IBEGG). Ion beam enhanced grain growth has been studied experimentally in Ge, Au and Si films. IBEGG has been characterized by varying the ion dose, ion energy, ion flux, ion species, temperature, and thin film deposition onrditions. The effect of these parameters on grain size and microstructure has Leen analyzed ...